Physiker:innen im Beruf | jDPG RG Kiel
The event will take place in hybrid form and will be held and streamed as part of the physics colloquium at Christian-Albrechts-Universität.
- Date:
- Tu, 02.05.2023 16:15 – Tu, 02.05.2023 18:15
- Speaker:
- Dr. Andreas Dorsel - Senior Advisor, ZEISS Sparte Semiconductor Manufacturing Technology Carl Zeiss SMT
- Address:
- Christian-Albrechts-Universität
Leibnizstraße 13, 24118 Kiel
Hans-Geiger-Hörsaal
- Language:
- English
- Contact person:
- Melina Seidel,
- DPG Association:
- Regional Group Kiel Working Group "Young DPG" (jDPG)
Description
title:
Optics is boring - or is it not?
It will briefly be explained why the answer to the title question may be of interest to you. This is followed by an attempt to provide such an answer, using the various optical systems used in nano-lithography to produce modern highly integrated electronic circuits, so-called microchips. The latest developments in the field of EUV (extreme ultra-violet) are also discussed. Individual requirements for different components resulting from system requirements are examined in greater depth. The interaction between the optical subsystem and the lithography machine, the so-called wafer-scanner, which act in closely interlocking interaction, is also touched upon. At the end, possible barriers to the unlimited continuation of Moore's Law are outlined.